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Key Features
- 3D High Precision Laser In-line Inspection
- Ultra-high Resolution
- Horizontal: 10µm/20µm (interchangeable)
- Vertical: 1µm (Best in Class)
- High-speed Inspection
- 33sq.cm/sec(5.3sq.in/sec) @ 20µm resolution
- 13.8sq/cm/sec(2.2sq.in/sec) @10µm resolution
- Easy Programming & Maintenance
- Program generation in approximately 5 minutes
- Consistent results regardless of Operator
- Automatic Calibration Function for easy maintenance
- SPC software included as standard for detailed analysis and traceability
- Reliable and accurate Zero Plane reference points
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