Key Features

  • 3D High Precision Laser In-line Inspection
  • Ultra-high Resolution
    • Horizontal: 10µm/20µm (interchangeable)
    • Vertical: 1µm (Best in Class)
  • High-speed Inspection
    • 33sq.cm/sec(5.3sq.in/sec) @ 20µm resolution
    • 13.8sq/cm/sec(2.2sq.in/sec) @10µm resolution
  • Easy Programming & Maintenance
    • Program generation in approximately 5 minutes
    • Consistent results regardless of Operator
  • Automatic Calibration Function for easy maintenance
  • SPC software included as standard for detailed analysis and traceability
  • Reliable and accurate Zero Plane reference points