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Key Features
- 100% In-line inspection
- Ultra-high Resolution
-Horizontal: 18µm/12µm/8µm
-Vertical: 3µm
- High-speed inspection
-23.5sq cm/sec. (3.7sq in/sec.) 18µm
-10.6sq cm/sec. (1.7sq in/sec. ) 12µm
- Inspection View: 28mm x 21mm (1.1" x 0.83")
- Windows PC based
- Control up to 6 SPI systems simultaneously with Data Station option!
- Powerful SPC software and tools for absolute control over line process
- User-friendly and intuitive operation
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